Ultra-Low Penetration Air (ULPA ) Filtration for Advanced Contamination Control

ULPA (Ultra-Low Penetration Air) filters are the highest efficiency class of particulate air filters designed for environments where extremely strict airborne contamination control is required.

Classified according to EN 1822 and ISO 29463 standards, ULPA filters include U15, U16 and U17 grades, providing ultra-high efficiency filtration for submicron and nanoscale particles. 

Compared with HEPA filters, ULPA filters provide a higher level of particle removal capability and are typically selected for advanced manufacturing processes where even trace contamination can impact product yield, equipment performance and process reliability.

ULPA filters are widely used in:

• Semiconductor fabrication facilities 

• Photolithography environments 

• Nanotechnology laboratories 

• Advanced electronics manufacturing 

• Pharmaceutical isolators 

• Biotechnology research facilities 

• Precision aerospace manufacturing

Why Are ULPA Filters Required in Advanced Cleanrooms?

As semiconductor technology continues to advance toward smaller process nodes, contamination control becomes increasingly critical.

Particles at the nanoscale can cause:

Wafer defects 

Patterning failures 

Reduced production yield 

Equipment contamination 

Process instability 

Advanced cleanroom environments typically require extremely high-efficiency filtration systems:

Pre Filter → Fine Filter → HEPA Filter → ULPA Filter

ULPA filters are used as the final filtration barrier in ultra-clean environments where conventional HEPA filtration may not provide sufficient particle control.

Typical applications include:

ISO Class 3–5 cleanrooms 

Semiconductor process areas 

Lithography tool environments 

Critical mini-environments

Key Features & Benefits

Ultra-High Particle Removal Efficiency

ULPA filters are designed to capture extremely fine airborne particles with efficiency levels higher than HEPA filters.

Available grades:

U15 

U16 

U17 

According to EN 1822 classification:

Filter Class Efficiency at MPPS

U15 ≥99.9995%

U16 ≥99.99995%

U17 ≥99.999995%

This exceptional filtration performance makes ULPA filters suitable for the most demanding contamination-controlled environments.

Advanced Micro Glass Fiber Media Technology

ULPA filters utilize specially engineered micro glass fiber media with optimized fiber diameter and pore structure.

Benefits include:

• Extremely high particle capture efficiency 

• Stable long-term filtration performance 

• Low particle shedding 

• Excellent chemical and temperature resistance 

Particle capture is achieved through multiple mechanisms:

• Diffusion 

• Interception 

• Inertial impaction 

• Electrostatic attraction

Low Pressure Drop & Energy Optimized Design

Although ULPA filters provide extremely high filtration efficiency, optimized media technology helps maintain reasonable airflow resistance.

Advantages include:

• Reduced fan energy consumption 

• Stable airflow distribution 

• Improved cleanroom energy efficiency 

• Longer operational life 

Filter pressure drop depends on:

• Filter dimensions 

• Air velocity 

• Media structure 

• Operating environment

Precision Manufacturing & Reliable Sealing

For semiconductor and advanced cleanroom applications, preventing air leakage is critical.

Our ULPA filters feature:

• High-strength aluminum or stainless-steel frames 

• Precision media bonding technology 

• Low-leakage sealing structures 

• Individual performance testing capability 

Available sealing options:

• Gasket seal 

• Gel seal 

• Knife-edge seal 

Suitable for:

• Fan Filter Units (FFU) 

• Cleanroom ceiling systems 

• Mini-environment systems 

• Equipment air filtration modules

ULPA Filter Configurations

Mini-Pleat ULPA Filters

Compact design with high filtration area.

Suitable for:

Semiconductor cleanrooms 

Equipment mini-environments 

Limited installation spaces 

Advantages:

High efficiency 

Low resistance 

Compact structure

FFU ULPA Filters

Designed for fan filter unit applications.

Applications:

Semiconductor fabs 

Flat panel display manufacturing 

Precision electronics production 

Benefits:

Uniform airflow distribution 

Stable clean air supply 

High reliability operation

Terminal ULPA Filters

Designed for critical cleanroom air supply systems.

Applications:

ISO Class 3–5 cleanrooms 

Nanotechnology laboratories 

Advanced research facilities

Typical Applications

Semiconductor Manufacturing

ULPA filters are widely used in semiconductor fabrication where airborne molecular and particulate contamination can directly affect wafer yield.

Applications include:

Lithography areas 

Etching processes 

Thin-film deposition zones 

Wafer inspection areas 

Equipment mini-environments

Photovoltaic & Advanced Electronics Manufacturing

Suitable for:

Solar cell production 

Display manufacturing 

Electronic component assembly 

Precision optical production 

ULPA filtration helps maintain stable manufacturing conditions and reduce contamination-related defects.

Pharmaceutical & Biotechnology

Used in:

Sterile isolators 

Advanced laboratory environments 

Cell therapy facilities 

High-containment production areas

Aerospace & Precision Manufacturing

ULPA filters provide ultra-clean air protection for:

Aerospace component manufacturing 

Optical systems 

Precision instruments

Technical Specifications

Actual filtration performance depends on filter grade, airflow conditions, installation design and testing requirements.

ULPA Filter Selection Guide

Final selection should consider:

• Required cleanroom classification 

• Particle control requirements 

• Airflow design 

• Energy consumption targets 

• Equipment specifications

Why Choose Our ULPA Filters?

Our ULPA filters are engineered for advanced cleanroom applications requiring the highest level of airborne contamination control.

Key advantages include:

✔ U15–U17 ultra-high efficiency filtration

✔ EN 1822 / ISO 29463 compliant design

✔ Low particle shedding performance

✔ Stable airflow characteristics

✔ Precision sealing technology

✔ OEM customization capability

✔ Application-specific filtration solutions

We provide ULPA filtration solutions for:

Semiconductor manufacturing 

Photovoltaic production 

Advanced electronics 

Pharmaceutical technology 

Precision industrial applications

Frequently Asked Questions

What is a ULPA filter?

A ULPA filter (Ultra-Low Penetration Air Filter) is an ultra-high efficiency air filter designed to remove extremely fine airborne particles in advanced cleanroom environments.

It is classified as U15, U16 or U17 according to EN 1822.

What is the difference between HEPA and ULPA filters?

The main difference is filtration efficiency.

HEPA Filter

H13/H14 classification 

Used in most cleanrooms, hospitals and laboratories 

ULPA Filter

U15/U16/U17 classification 

Higher efficiency 

Used for semiconductor fabs and ultra-clean environments

Are ULPA filters required for semiconductor manufacturing?

For advanced semiconductor processes, ULPA filtration is commonly used in areas requiring extremely low particle levels, especially critical process zones and equipment mini-environments.

Can ULPA filters replace HEPA filters?

Not always.

HEPA filters are suitable for many cleanroom applications. ULPA filters are selected when stricter contamination control requirements justify the higher efficiency and operating cost.

Can ULPA filters be customized?

Yes.

Customized solutions are available for:

Filter dimensions 

Efficiency grade 

Frame materials 

Seal configurations 

FFU and equipment integration